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Model of magnetically enhanced, capacitive RF discharges

✍ Scribed by Lieberman, M.A.; Lichtenberg, A.J.; Savas, S.E.

Book ID: 117861955
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 637 KB
Volume: 19
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.106813

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