✦ LIBER ✦

Extinction of RF capacitive low-pressure discharges

✍ Scribed by Lisovskiy, V; Booth, J.-P; Martins, S; Landry, K; Douai, D; Cassagne, V

Book ID: 125475888
Publisher: EDP Sciences
Year: 2005
Tongue: English
Weight: 144 KB
Volume: 71
Category: Article
ISSN: 0295-5075
DOI: 10.1209/epl/i2005-10108-1

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