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Electronic energy spectrum of the sheath of an asymmetric low-pressure capacitive rf discharge

✍ Scribed by A. F. Aleksandrov; A. A. Rukhadze; V. P. Savinov; I. F. Singaevski


Book ID
110124112
Publisher
SP MAIK Nauka/Interperiodica
Year
1999
Tongue
English
Weight
52 KB
Volume
25
Category
Article
ISSN
1063-7850

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