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Pressure Dependence of the Mean Electron Energy in the Bulk Plasma of an RF Discharge in Argon

✍ Scribed by R. J. Seeböck; W. E. Köhler; M. Römheld

Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 522 KB
Volume: 32
Category: Article
ISSN: 0005-8025
DOI: 10.1002/ctpp.2150320604

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