Harmonics Analysis of the Electron Component of rf Bulk Plasmas II. Electron Distribution Function and Relevant Macroscopic Quantities in H2

Low-Pressure PECVD of Nanoparticles in C

Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function

✍ M. Camero; F. J. Gordillo-Vázquez; C. Gómez-Aleixandre 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 688 KB

## Abstract A study of the synthesis of carbon nanoparticles embedded in carbon thin films deposited by radiofrequency (RF) (13.56 MHz) Ar/H~2~ (4 %)/C~2~H~2~ plasmas is presented. The carbon nanospheres exhibit an amorphous structure that is clearly observed at 300 W, under 0.1 Torr, and grows in