Electron Energy Distribution Functions in RF Molecular Plasmas: The Role of Second Kind Collisions

✍ Scribed by M. Capitelli; M. Dilonardo; R. Winkler; J. Wilhelm

• Publisher: John Wiley and Sons
• Year: 1986
• Tongue: English
• Weight: 434 KB
• Volume: 26
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.19860260608