✦ LIBER ✦

Reactive sputtering of Ti target with nonneutralized Ar beam

✍ Scribed by W.B Peng; E.V Sviridov; M Chen; J.G Zhu; D.Q Xiao

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Target poisoning during reactive sputter

✍ M.M. Waite; S. Ismat Shah 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 488 KB

Current-Voltage Characteristic of Reacti

✍ Salm, J. ;Steenbeck, K. ;Steinbeiss, E. 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 157 KB

The abrasion of hot silicon targets by r

✍ K. Steenbeck 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Mechanisms of the reactive- and chemical

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 322 KB

Plasma diagnostics by energy resolved qu

✍ K. Ellmer; D. Lichtenberger 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 562 KB

Reactive high rate D.C. sputtering: Depo

✍ S. Schiller; G. Beister; W. Sieber 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 503 KB