✦ LIBER ✦
Mechanisms of the reactive- and chemical-sputter deposition of TiO2 from Ti and TiC targets in mixed Ar + O2 discharges
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 322 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0042-207X
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