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Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate

✍ Scribed by Mahieu, S; Depla, D

Book ID: 120190706
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 440 KB
Volume: 42
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/42/5/053002

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