The properties of TiN ultra-thin films grown on SiO2 substrate by reactive high power impulse magnetron sputtering under various growth angles

✍ Scribed by Shayestehaminzadeh, S.; Tryggvason, T.K.; Karlsson, L.; Olafsson, S.; Gudmundsson, J.T.

• Book ID: 121356771
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 587 KB
• Volume: 548
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.09.025