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Morphology of TiN thin films grown on SiO2 by reactive high power impulse magnetron sputtering

✍ Scribed by F. Magnus; A.S. Ingason; O.B. Sveinsson; S. Olafsson; J.T. Gudmundsson

Book ID: 113937172
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 626 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.07.041

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