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Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

✍ Scribed by F.X. Cheng; C.H. Jiang; J.S. Wu

Publisher: Elsevier Science
Year: 2005
Weight: 200 KB
Volume: 26
Category: Article
ISSN: 0261-3069
DOI: 10.1016/j.matdes.2004.06.004

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