Preparation of MgB2 superconducting thin films by magnetron sputtering

✍ Scribed by R. Mičunek; A. Plecenik; P. Kúš; M. Zahoran; M. Tomášek; T. Plecenik; M. Gregor; M. Štefečka; V. Jacko; J. Greguš; B. Grančič; M. Kubinec; M. Mahel’

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 383 KB
• Volume: 435
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/j.physc.2006.01.022

✦ Synopsis

Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor thin films annealed ex situ in argon atmosphere at temperature range from 500 °C to 700 °C exhibit smooth superconducting transition with onset critical temperature T con 6 35 K and zero resistance T c0 6 32 K. Preparation of microstructures and measurement of critical current density are also discussed.