✦ LIBER ✦

Control of aluminum doping of ZnO:Al thin films obtained by high-power impulse magnetron sputtering

✍ Scribed by V. Tiron; L. Sirghi; G. Popa

Book ID: 113937602
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 559 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.02.079

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of Al heavy-doped ZnO thin fi

Properties of Al heavy-doped ZnO thin films by RF magnetron sputtering

✍ L.J. Li; H. Deng; L.P. Dai; J.J. Chen; Q.L. Yuan; Y. Li 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 873 KB

Properties of fluorine doped ZnO thin fi

Properties of fluorine doped ZnO thin films deposited by magnetron sputtering

✍ H.S. Yoon; K.S. Lee; T.S. Lee; B. Cheong; D.K. Choi; D.H. Kim; W.M. Kim 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 388 KB

Formation of Al-doped ZnO films by dc ma

Formation of Al-doped ZnO films by dc magnetron reactive sputtering

✍ M. Chen; Z.L. Pei; C. Sun; L.S. Wen; X. Wang 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 70 KB

Characterization and device applications

Characterization and device applications of ZnO films deposited by high power impulse magnetron sputtering (HiPIMS)

✍ Partridge, J G; Mayes, E L H; McDougall, N L; Bilek, M M M; McCulloch, D G 📂 Article 📅 2013 🏛 Institute of Physics 🌐 English ⚖ 388 KB

Optimization of aluminum-doped ZnO thin-

Optimization of aluminum-doped ZnO thin-film deposition by magnetron sputtering for liquid crystal display applications

✍ Minami, Tadatsugu ;Miyata, Toshihiro ;Ohtani, Yuusuke 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 236 KB

## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indium‐tin‐oxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thin‐film preparation techni

Effect of hydrogen doping in ZnO thin fi

Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

✍ Young Ran Park; Juho Kim; Young Sung Kim 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 491 KB