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Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

โœ Scribed by Young Ran Park; Juho Kim; Young Sung Kim

Book ID
108064056
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
491 KB
Volume
255
Category
Article
ISSN
0169-4332

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Growth and characteristics of hydrogenat
Growth and characteristics of hydrogenated In-doped ZnO thin films by pulsed DC magnetron sputtering
โœ Young Ran Park; Juho Kim; Young Sung Kim ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 430 KB

We investigated the role of hydrogen impurities in highly oriented In-doped ZnO (IZO:H) films. The conductivity of ZnO:H films exhibit small variation despite the increase of hydrogen ratio. The small variation of the carrier concentration in IZO:H films can be explained by the reduction of the oxyg