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Formation of Al-doped ZnO films by dc magnetron reactive sputtering

✍ Scribed by M. Chen; Z.L. Pei; C. Sun; L.S. Wen; X. Wang


Book ID
117356220
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
70 KB
Volume
48
Category
Article
ISSN
0167-577X

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