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Reactive sputter deposition and properties of TaxN thin films

✍ Scribed by T Riekkinen; J Molarius; T Laurila; A Nurmela; I Suni; J.K Kivilahti

Book ID
104305748
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
617 KB
Volume
64
Category
Article
ISSN
0167-9317

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