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Reactive scattering study of etching dynamics: HCl on GaAs(100)

✍ Scribed by Essex-Lopresti, Johnathan; Jia, Weijie; Munro, Simon; Gorry, Peter A.

Book ID: 121221472
Publisher: Royal Society of Chemistry
Year: 2000
Tongue: English
Weight: 239 KB
Volume: 2
Category: Article
ISSN: 1463-9076
DOI: 10.1039/A907410D

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