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Reactive scattering study of etching dynamics: Cl2 on GaAs(100)

โœ Scribed by P. Bond; P.N. Brier; J. Fletcher; W.J. Jia; H. Price; P.A. Gorry


Book ID
117218942
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
673 KB
Volume
418
Category
Article
ISSN
0039-6028

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