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Reactive pulsed laser deposition of CNx films

โœ Scribed by Zhao, X.-A.; Ong, C. W.; Tsang, Y. C.; Wong, Y. W.; Chan, P. W.; Choy, C. L.


Book ID
125457775
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
348 KB
Volume
66
Category
Article
ISSN
0003-6951

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