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Structural studies of reactive pulsed laser-deposited CNx films by X-ray photoelectron spectroscopy and infrared absorption

✍ Scribed by C. W Ong; X.-A Zhao; Y. C Tsang; C. L Choy; P. W Chan

Book ID: 110372401
Publisher: Springer
Year: 1997
Tongue: English
Weight: 381 KB
Volume: 32
Category: Article
ISSN: 0022-2461
DOI: 10.1023/a:1018540704152

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