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X-ray photoelectron spectroscopy characterization of CNx thin films deposited by electron beam evaporation and nitrogen ion bombardment

โœ Scribed by Petrov, P

Book ID
122461989
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
128 KB
Volume
9
Category
Article
ISSN
0925-9635

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Carbon nitride films synthesized by elec
Carbon nitride films synthesized by electron beam evaporation of carbon and nitrogen ion bombardment
โœ P. Petrov; D. Dimitrov; G Beshkov; V. Krastev; S. Nemska; Ch. Georgiev ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 115 KB

Carbon nitride thin films deposited on Si(1 0 0) have been synthesized by electron beam evaporation of graphite in nitrogen atmosphere for various N pressures and at different substrate temperatures. The layers were analyzed by X-ray photoelectron spectra, Fourier transforms infrared spectroscopy an