Heat-Induced Polymerization of a-CNx Films Grown by Pulsed Laser Deposition

✍ Scribed by G. Soto

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 68 KB
• Volume: 230
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(200204)230:2<351::aid-pssb351>3.0.co;2-1