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Reactive ion beam etching of InSb and InAs with ultrasmooth surfaces

✍ Scribed by Frost, F; Schindler, A; Bigl, F

Book ID: 120992099
Publisher: Institute of Physics
Year: 1998
Tongue: English
Weight: 314 KB
Volume: 13
Category: Article
ISSN: 0268-1242
DOI: 10.1088/0268-1242/13/5/014

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