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Chlorine reactive ion beam etching of InSb and InAs0.15Sb0.85/InSb strained-layer superlattices

✍ Scribed by Vawter, G. Allen; Wendt, Joel R.

Book ID: 121018578
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 752 KB
Volume: 58
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.104664

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