XPS studies on damage evaluation of single-crystal diamond chips processed with ion beam etching and reactive ion beam assisted chemical etching

✍ Scribed by Kawabata, Yusaku; Taniguchi, Jun; Miyamoto, Iwao

• Book ID: 123462832
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 198 KB
• Volume: 13
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2003.09.005