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Ion beam assisted chemical etching of single crystal diamond chips

✍ Scribed by Shuji Kiyohara; Iwao Miyamoto; Kazushige Kitazawa; Satoshi Honda

Book ID: 114168317
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 357 KB
Volume: 121
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00390-4

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