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Chemically assisted ion beam etching of submicron features in GaSb

โœ Scribed by Nagy, G.; Ahmad, R. U.; Levy, M.; Osgood, R. M.; Manfra, M. J.; Turner, G. W.


Book ID
118025176
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
431 KB
Volume
72
Category
Article
ISSN
0003-6951

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