✦ LIBER ✦
Precise nonselective chemically assisted ion-beam etching of AlGaAs/GaAs Bragg reflectors byin situlaser reflectometry
✍ Scribed by J. Y. Yoo; J. H. Shin; Y. H. Lee; H. -H. Park; B. -S. Yoo
- Publisher
- Springer
- Year
- 1995
- Tongue
- English
- Weight
- 446 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0306-8919
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