Novel precursors for chemically assisted ion beam etching : reactions of dichloroethane on GaAs (100)

✍ Scribed by Duncan Marshall; Richard B Jackman

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 766 KB
• Volume: 44
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(93)90164-6