✦ LIBER ✦
Chemical etching of GaAs with a novel low energy ion beam source : A low damage process for device fabrication
✍ Scribed by Judith Beckman; Richard B Jackman
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 558 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0042-207X
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