Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

✍ Scribed by J. Taniguchi; J. Yokoyama; M. Komuro; H. Hiroshima; I. Miyamoto

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 773 KB
• Volume: 53
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(00)00346-4

✦ Synopsis

We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission site.