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Reactive DC magnetron sputtering of aluminum nitride films for surface acoustic wave devices

✍ Scribed by Assouar, M.B.; Elmazria, O.; Le Brizoual, L.; Alnot, P.

Book ID: 122016364
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 356 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00708-7

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