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RBS depth profiling of light elements in non-homogenous binary films

✍ Scribed by V. Hnatowicz; J. Kvítek; V. Voseček; F. Černy̌

Book ID: 113284441
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 670 KB
Volume: 83
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95858-3

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