Non-regular depth profiles of light ions implanted into organic polymer films

✍ Scribed by D. Fink; M. Müller; U. Stettner; M. Behar; P.F.P. Fichtner; F.C. Zawislak; S. Koul

• Book ID: 113278997
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 392 KB
• Volume: 32
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(88)90199-1