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Radiation damage in dry etching

✍ Scribed by S.W. Pang

Book ID: 107920316
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 498 KB
Volume: 5
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(86)90064-x

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