✦ LIBER ✦
Challenges in dry etching: uniformity, selectivity, pattern dependencies, damage, and cleaning
✍ Scribed by Herbert H. Sawin
- Book ID
- 103599257
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 541 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.