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Damage studies in dry etched textured silicon surfaces

โœ Scribed by G Kumaravelu; M.M Alkaisi; A Bittar; D Macdonald; J Zhao

Book ID
108078869
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
287 KB
Volume
4
Category
Article
ISSN
1567-1739

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There has been steady progress in understanding the propagation of low energy, ion-induced damage into semiconductor substrates. Specially designed hetemstructure (quantum well) substrates allows us to trace the profile of damage into the material. A number of experiments have highlighted the surpri