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Lattice damage in III/V compound semiconductors caused by dry etching

✍ Scribed by Heinbach, M.; Kaindl, J.; Franz, G.

Book ID: 121660143
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 318 KB
Volume: 67
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.115069

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