✦ LIBER ✦
Temperature-dependent dry etching characteristics of III–V semiconductors in HBr- and HI-based discharges
✍ Scribed by S. J. Pearton; F. Ren; C. R. Abernathy
- Book ID
- 105208042
- Publisher
- Springer
- Year
- 1994
- Tongue
- English
- Weight
- 880 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0272-4324
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