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Quantitative model of the thickness dependence of breakdown in ultra-thin oxides

โœ Scribed by J.H. Stathis


Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
303 KB
Volume
36
Category
Article
ISSN
0167-9317

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โœ Jordi Suรฑรฉ; Ernest Wu ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 101 KB

A complete picture of breakdown is presented and compared with a full set of experiments. First, an analytical model for the breakdown statistics is proposed. This model is shown to have essentially the same predictive power as the percolation approach. Second, a hydrogen-based quantitative picture