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Quantitative electron channeling measurement of ion implantation damage in aluminum

✍ Scribed by R.G. Vardiman

Book ID: 113277445
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 688 KB
Volume: 16
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90005-4

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