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Multiscale approach for the analysis of channeling profile measurements of ion implantation damage

✍ Scribed by G. Hobler; G. Otto; D. Kovač; L. Palmetshofer; K. Mayerhofer; K. Piplits


Book ID
103858793
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
308 KB
Volume
228
Category
Article
ISSN
0168-583X

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