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Quantitative determination of the charge carrier concentration of ion implanted silicon by IR-near-field spectroscopy

✍ Scribed by Jacob, Rainer; Winnerl, Stephan; Schneider, Harald; Helm, Manfred; Wenzel, Marc Tobias; von Ribbeck, Hans-Georg; Eng, Lukas M.; Kehr, Susanne C.

Book ID: 115413762
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 967 KB
Volume: 18
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.18.026206

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