Determination of charge carrier concentration in heavily doped polycrystalline silicon films from the IR transmission and reflection spectra

✍ Scribed by V. A. Samuilov; V. F. Stel'makh; A. M. Yanovskii

• Publisher: Springer US
• Year: 1990
• Tongue: English
• Weight: 427 KB
• Volume: 52
• Category: Article
• ISSN: 0021-9037
• DOI: 10.1007/bf00664786