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Quantification of Ge in Si1-xGex by using low-energy Cs+ and O2+ ion beams

✍ Scribed by Rathaiah Pureti; W. Vandervorst

Book ID: 112206874
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 232 KB
Volume: 45
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.5049

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