Low temperature growth of A1n and Al2O3 films by the simultaneous use of a microwave ion source and an ionized cluster beam system

✍ Scribed by Hiroshi Takaoka; Junzo Ishikawa; Toshinori Takagi

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 827 KB
• Volume: 157
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90355-0