Low temperature growth of AIN and Al2O3 films by the simultaneous use of a microwave ion source and an ionized cluster beam system Hiroshi Takaoka et al,Thin Solid Films,157, 1988, 143–158

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 153 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90811-7