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Comparative study of low energy ion beam oxidation of Si(100), Ge/Si(100) and Si1−xGex/Si(100)

✍ Scribed by O. Vancauwenberghe; O.C. Hellman; H. Herbots; W.J. Tan; J.L. Olson; W.J. Croft

No coin nor oath required. For personal study only.

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