✦ LIBER ✦

Pulsed DC Reactive Magnetron Sputtering of AlN Thin Films on High Frequency LTCC Substrates

✍ Scribed by Lee, Jung W.; Cuomo, Jerome J.; Moody, Baxter F.; Cho, Yong S.; Keusseyan, Roupen L.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study of reactive DC magnetron sputterin

✍ VI Dimitrova; DI Manova; DA Dechev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 443 KB

Photocatalytic TiO2 thin films deposited

✍ D.Y. Chen; C.C. Tsao; C.Y. Hsu 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 735 KB

Effects of film density on electrochromi

✍ Xilian Sun; Zhimin Liu; Hongtao Cao 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 350 KB

Influence of deposition conditions on op

✍ Arshad Mahmood; Nikifor Rakov; Mufei Xiao 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 324 KB

Structure and electrical properties of A

✍ Meng, Xiangqin; Yang, Chengtao; Yang, Jiancang 📂 Article 📅 2014 🏛 The Korean Institute of Metals and Materials 🌐 English ⚖ 418 KB

Effect of substrate bias voltage on the

✍ A. Mallikarjuna Reddy; A. Sivasankar Reddy; P. Sreedhara Reddy 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 626 KB